Electron-Beam Lithography as a Tool for Teaching Silicon Photonics
Document Type
Article
Publication Date
1984
DOI Number / ISBN
10.1016/0022-4596(84)90310-4
External Access URL
http://dx.doi.org/10.1016/0022-4596(84)90310-4
Recommended Citation
Siahmakoun, A. (2022). Electron-beam lithography as a tool for teaching silicon photonics. Optics Education and Outreach VII Proceedings (Vol. PC12213, p. PC122130). https://doi.org/10.1117/12.2633689
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