Electron-Beam Lithography as a Tool for Teaching Silicon Photonics

Authors

Robert Bunch, Rose-Hulman Institute of TechnologyFollow
M. Abraham
L. Boatner
W. Christie
F. Modine

Document Type

Article

Publication Date

1984

DOI Number / ISBN

10.1016/0022-4596(84)90310-4

External Access URL

http://dx.doi.org/10.1016/0022-4596(84)90310-4

Recommended Citation

Siahmakoun, A. (2022). Electron-beam lithography as a tool for teaching silicon photonics. Optics Education and Outreach VII Proceedings (Vol. PC12213, p. PC122130). https://doi.org/10.1117/12.2633689