Date of Award

Spring 5-2014

Document Type

Thesis

Degree Name

Master of Science in Optical Engineering

Department

Department of Physics and Optical Engineering

First Advisor

Paul Leisher

Second Advisor

Azad Siahmakoun

Third Advisor

Edward Wheeler

Abstract

The semiconductor laser was invented in 1962, and has recently become ubiquitous in modern life. This thesis focuses on the development of a semiconductor laser fabricating process which utilizes semiconductor manufacturing technology in a cleanroom environment including photolithography, etching, deposition, and bonding processes. A photomask for patterning is designed, recipes of photolithography process and etching process are developed with experiments. This work gives how to develop the process of fabrication and determine the parameters for each processes. A series of semiconductor laser devices are then fabricated using the developed process and characterization is performed to assess device performance with industrial standard methods. A fabricated device has 18W power and 11% conversion efficiency.

Comments

Fourth Adviser: Youghak Cho

Download

Share

COinS