Introductory MEMS: Fabrication and Applications, 2010

Authors

Richard A. Layton, Rose-Hulman Institute of TechnologyFollow
Thomas M. Adams, Rose-Hulman Institute of TechnologyFollow

Document Type

Book

Publication Date

2010

External Access URL

https://link-springer-com.libproxy.rose-hulman.edu/book/10.1007%2F978-0-387-09511-0

Recommended Citation

Layton, R. A., & Adams, T. M. (2010). Introductory MEMS: Fabrication and Applications. Springer. https://link-springer-com.libproxy.rose-hulman.edu/book/10.1007%2F978-0-387-09511-0