Nanoscale tilt measurement using a cyclic interferometer with polarization phase stepping and multiple reflections

Authors

Ashley Bernal, Rose-Hulman Institute of TechnologyFollow
Charles Joenathan, Rose-Hulman Institute of TechnologyFollow
T. Naderishahab, Rose-Hulman Institute of Technology
A. B. Krovetz, Rose-Hulman Institute of Technology
V. C. Pretheesh Kumar, Indian Institute of Technology
A. R. Ganesan, Indian Institute of Technology

Document Type

Article

Publication Date

2018

DOI Number / ISBN

10.1364/AO.57.000B52

External Access URL

https://doi.org/10.1364/AO.57.000B52

Recommended Citation

Bernal, A., Joenathan, C., Naderishahab, T., Krovetz, A. B., Pretheesh Kumar, V. C., & Ganesan, A. R. (2018). Nanoscale tilt measurement using a cyclic interferometer with polarization phase stepping and multiple reflections. Applied Optics, 57(7), B52-B58. https://doi.org/10.1364/AO.57.000B52