Date of Award

Spring 5-1-2020

Document Type



Department of Physics and Optical Engineering

First Advisor

Alisafaee, Houssein

Second Advisor

Siahmakoun, Azad

Third Advisor

Joo, Wonjong


This thesis describes a new method for fabrication of biaxial hyperbolic metamaterials (BHMMs) using layered structures consisting of oblique angle deposited (OAD) titanium dioxide (TiO2) and copper (Cu). An oblique angle deposition (OAD) technique was utilized to deposit dielectric layer composed of nanocolumnar structures in order to provide biaxial property. The biaxial hyperbolic dispersion of the fabricated BHMM was characterized via profilometer and variable angle spectroscopic ellipsometry (VASE) measurements for wavelength between 381 nm and 894 nm. For the fabricated BHMM, a noticeable difference of 0.13 - 0.001 between the in-plane permittivity components and dual epsilon-near-zero (ENZ) regions which are separated by 6.7 nm were observed. The experimental characterization results through both VASE and profilometer have been in good agreement with the predictions of effective medium approximation (EMA). The proposed fabrication method is efficient for rapid procedures to obtain BHMMs, and this potentially provides basis for further research in nanophotonics applications.

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