Date of Award

Spring 5-2014

Document Type


Degree Name

Master of Science in Optical Engineering


Department of Physics and Optical Engineering

First Advisor

Robert Bunch

Second Advisor

Zachariah Chambers

Third Advisor

Paul Leisher


Defining the scatter characteristics of surfaces plays an important role in various technology industries such as the semiconductor, automobile, and military industries. Scattering can be used to inspect products for problems created during the manufacturing process and to generate the specifications for engineers. In particular, scattering measurement systems and models have been developed to define the surface properties of a wide variety of materials used in manufacturing. However, most previous research has been focused on very smooth surfaces as a nano-scale roughness. The research in this paper uses the Bidirectional Reflectance Distribution Function (BRDF) and focuses on defining the scattering properties of micro-scale rough and textured surfaces for three different incident angles. Also, the parameters of ABg and Harvey-Shack models are obtained for input into optical design software.