Title

Introductory MEMS: Fabrication and Applications, 2010

Document Type

Book

Publication Date

2010

DOI Number / ISBN

9780387095103 (hb), 0387095101 (hb), 9780387095110 (eb), 038709511x (eb)

External Access URL

https://link-springer-com.libproxy.rose-hulman.edu/book/10.1007%2F978-0-387-09511-0

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