Modeling, Design, and Fabrication of Plasmonic Coupling to a Silicon Nitride Waveguide-Photodetector
Date of Award
Master of Science in Optical Engineering
Department of Physics and Optical Engineering
Kim, Dong Hwan
This paper reports an evanescent coupling to silicon nitride-Germanium (SiN-Ge) photodetectors using surface plasmon polaritons (SPPs). Modeling, design, and fabrication of plasmonic coupling to Al nanoscale metal and light detection are included. Since 10 % of light coupled with surface plasmons is detected from poly-Si waveguides using lens fiber, Ge-photodetectors and SiN waveguides are utilized to detect light around 1550 nm wavelength with less insertion loss. Two plasmonic configurations with either Ag or Al nanoscale metal are simulated and analyzed using Lumerical FDTD simulation. Difficulty during fabricating SiN-Ge photodetectors are mentioned, and the best design and fabrication are suggested. The results in this paper can be applied to the design and fabrication of plasmonic systems with SiN-Ge photodetectors.
Jeong, Jaehoon, "Modeling, Design, and Fabrication of Plasmonic Coupling to a Silicon Nitride Waveguide-Photodetector" (2021). Graduate Theses - Physics and Optical Engineering. 9.