Date of Award

Spring 5-2019

Document Type


Degree Name

Master of Science in Optical Engineering


Department of Physics and Optical Engineering

First Advisor

Siamakoun, Azad

Second Advisor

Granieri, Sergio

Third Advisor

Joo, Won Jong


The purpose of this work is to build silicon photonic devices and verify their functionalities. In particular, the structure of a ring resonator (RR) is analyzed and applied to various silicon photonic application in sensing. Silicon waveguides, grating couplers, directional couplers, and RRs are fabricated on the silicon-on-insulator (SOI) wafer. Geometrical parameters and optical properties of the silicon devices are studied and also applied to the design of the aforementioned devices. The waveguide dimensions and, optical properties of the silicon waveguide such as dispersion and effective-index are examined. The RRs are made of a series of straight and bent waveguides which are analyzed as a function of their geometrical variables such as path length of ring resonator and the gap between the bus and the bent waveguide forming the RR. Device fabrication is done in collaboration with the University of Minnesota where the Electron-beam lithography is performed. Finally, the devices are tested, and their performance is characterized. The average measured channel spacing between four channels of an integrated wavelength-division multiplexer is 1.825 +/- 0.01 nm. The experimental errors and their corresponding factors are discussed in details since the measured data reveal the devices performed inefficiently when compared to the simulations and theoretical predictions.