Increasing the Sensitivity of the Michelson Interferometer through Multiple Reflection

Woonghee Youn, Rose-Hulman Institute of Technology

I would have never been able to finish my study without my family, mother, father and sister. First and foremost I really want to express my sincere gratitude to my advisor Prof. Charles Joenathan, chair of RHIT Physics and Optical Engineering Department, for endless support of my study and life in Rose-Hulman Institute of Technology. He has been supportive since I arrived school and he encouraged me when I had tough time. His guidance helped me in all the time of research and study. I could not forget his advises and assists. I would like to thank my thesis committees: Prof. Ashley Bernal, Prof. Robert Bunch, Prof. Kim Sungdong and Prof. Joo Wonjong for their guidance, caring and encouragements. My sincere thanks also goes to Prof. Sarah Eunkyung Kim, who advised me when I was in Korea, and Prof. Michael McInerney. Prof. Michael McInerney helped me and my friends when we settled down in Terre Haute. And I would like to show appreciation to my friends; Benjamin, Yonghee, Wanseok, Junyeob, Yeohun, Yanzeng and Heesoo. They were always willing to help and give their best suggestions. 사랑하는 어머니, 아버지, 동생 세희, 그리고 절 친 자식처럼 아껴주시는 이모, 이모부께 감사 드립니다. My sense of gratitude to one and all, who helped me directly or indirectly.

Abstract

Michelson interferometry has been one of the most famous and popular optical interference system for analyzing optical components and measuring optical metrology properties. Typical Michelson interferometer can measure object displacement with wavefront shapes to one half of the laser wavelength. As testing components and devices size reduce to micro and nano dimension, Michelson interferometer sensitivity is not suitable. The purpose of this study is to design and develop the Michelson interferometer using the concept of multiple reflections. This thesis proposes a new and novel design for a multiple reflection interferometer, where the number of reflections does not affect the quality of the interference. Theoretically we show that more than 1000 reflections can be achieved. Experimental results of greater than 100 reflections are presented in this thesis.