Date of Award
Master of Science in Optical Engineering
Department of Physics and Optical Engineering
The semiconductor laser was invented in 1962, and has recently become ubiquitous in modern life. This thesis focuses on the development of a semiconductor laser fabricating process which utilizes semiconductor manufacturing technology in a cleanroom environment including photolithography, etching, deposition, and bonding processes. A photomask for patterning is designed, recipes of photolithography process and etching process are developed with experiments. This work gives how to develop the process of fabrication and determine the parameters for each processes. A series of semiconductor laser devices are then fabricated using the developed process and characterization is performed to assess device performance with industrial standard methods. A fabricated device has 18W power and 11% conversion efficiency.
Song, Junyeob, "Fabrication and Characterization of Edge-Emitting Semiconductor Lasers" (2014). Graduate Theses - Physics and Optical Engineering. 1.