Title

Lumped Element Model for a MEMS Hot Arm Actuator

Document Type

Article

Publication Date

2010

DOI Number

10.1007/978-0-387-09511-0

External Access URL

https://books.google.com/books?id=jXJCAAAAQBAJ&pg=PA314&lpg=PA314&dq=Lumped+Element+Model+for+a+MEMS+Hot+Arm+Actuator&source=bl&ots=8aR0SpsxGJ&sig=ysEyqwlAS1xA1dDL8V0zBOMFnCA&hl=en&sa=X&ved=0ahUKEwjR7ffrj9TSAhUD5mMKHWsvCYgQ6AEILzAE#v=onepage&q=Lumped%20Element%20Model%20for%20a%20MEMS%20Hot%20Arm%20Actuator&f=false